Reducing computing time is a constant subject in the world of IT Now modern laser technology is intended to help raise computers to new levels of speed and effi ciency tomorrow shows two examples Another method to make computers faster by using lasers is extreme ultraviolet EUV litho graphy A chip today consists of billions of tiny structures created on thin silicon plates by means of ultraviolet light UV The larger the number of these structures on a chip the faster and high er its performance However this convention al method is increasingly reaching technical and economic limits but the limits of optics can be shifted by means of EUV lithography The tech nique that has been developed by the Fraun hofer Institute for Applied Optics and Precision Engineering IOF together with companies such as Zeiss and Trumpf uses extreme ultraviolet i e ultra shortwave light EUV and sophisticat ed optical and mirror systems enabling even tini Fast chips Light show 60

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